マイクロ波帯のMEMS応用技術の動向 ――RF MEMSは課題を克服し,無線機器の性能向上に貢献できるか?
参考・引用*文献
(1) V.Lubecke,K. Mizuno,and G. Rebeiz,"Micromachining for terahertz applications",IEEE Trans. Microwave Theory Tech.,vol.46,no.11,pp.1821-1831,Nov.1998.
(2) G.Rebeiz,D. Kasilingam,Y. Guo,P. Stimpson,and D. Rutledge,"Monolithic millimeter-wave two-dimensional horn imaging arrays",IEEE Trans. Antenna Propagat.,vol.38,no.9,pp.1473-1482,Sept. 1990.
(3) J.-C.Chiao,Y. Fu,I Chio,M. DeLisio and L.-Y. Lin,"MEMS reconfigurable Vee antenna",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1515-1518,June 1999.
(4) T.Weller,L. Katehi,and G. Rebeiz,"A 250-GHz microshield bandpass filter",IEEE Microwave Guided Wave Lett.,vol.5,no.5,pp.153-155,May 1995.
(5) A.Brown and G. Rebeiz,"A high-performance integrated K-band diplexer",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1231-1234,June 1999.
(6) W.R. McGrath,C. K. Walker,M. Yap,and Y.-C. Tai,"Silicon micromachined waveguides for millimeter and submillimeter wave frequencies",IEEE Microwave Guided Wave Lett.,vol. 3,pp. 61-63,Jan. 1993.
(7) C.Mann,"Terahertz technology,A new era for waveguide?",23rd Int'l Conf. Infrared Millimetere waves,pp.13-16,Sept. 1998.
(8) J.-B.Yoon,C.-H. Han,E. Yoon and C.-K. Kim,"High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1523-1526,June 1999.
(9) H.Jiang,Y. Wang,J.-L. Yeh,N. Tien,"Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating",2000 IEEE MTT-S Int'l Microwave Symp. Dig.,no.TU4B-1,pp.279-282,June 2000.
(10) K.Petersen,"Micromechanical membrane switches on silicon",IBM J. Res. Develop.,vol. 23,pp.376-385,July 1979.
(11) H.Kim,J. Park,Y. Kim,and Y. Kwon,"Millimeter-wave micromachined tunable filteres",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1235-1238,June 1999.
(12) J.Muldavin and M. Gabriel,"30 GHz tuned MEMS switches",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1511-1514,June 1999.
(13) K.Suzuki,S. Chen,T. Marumoto,Y. Ara,and R. Iwata,"A micromachined RF microswitch applicable to phased-array antennas",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1923- 1926,June 1999.
(14) J.Chiao and D. Rutledge,"Microswitch beam-steering grid",Int'l Conf. Millimeter Submillimeter Waves and Applications,Jan. 1994.
(15) D.Hah,E. Yoon,and S. Hong,"A low voltage actuated micromachined microwave switch using torsion spring and leverage",2000 IEEE MTT-S Int'l Microwave Symp. Dig.,no.TU3B- 2,pp.157-160,June 2000.
(16) L.E. Larson,R. H. Hackett,M. A. Melendes,and R F. Lohr,"Micromachined microwave actuator(MI-MAC)technology- A new tunig approach for micrwave integrated circuits",IEEE Microwave Millimeter-wave Monolithic Circuits Symp. Dig.,pp.27-30,June 1991.
(17) 濱野哲子,ルベッキ ヴィクタ,水野皓司,「マイクロマシン技術を応用した感光性プラスチックサブミリ波帯回路素子の試作」,『信学技報』,no.ED-98-199,pp.7-12,1999年1月.
(18) H.Morkner,R. Ruby,M. Frank,D. Figueredo,"AN INTEGRATED FBAR FILTER AND PHEMT SWITCHED -AMP FOR WIRELESS APPLICATIONS",1999 IEEE MTT-S Int'l Microwave Symp. Dig.,pp.1393-1396,June 1999.
(19) 水野皓司,「マイクロ波・ミリ波・テラヘルツ波帯のマイクロマシン応用技術」,『電気学会論文誌E』,Vol. 121-E,No.11,2001年11月.
(20) 池田恭一,「マイクロシステムの原理と応用」,『Design Wave Magazine』,pp.84-90,2001年11月号.
みずの・こうじ
東北大学 電気通信研究所
◆筆者プロフィール◆
水野皓司.1968年,東北大学工学部 大学院博士課程了.同大学助手,助教授を経て,1984年に教授(電気通信研究所)となる.1990~1998年に理化学研究所(フォトダイナミクス研究センター)のチーム・リーダを兼務.この間,ミリ波,サブミリ波帯デバイス・計測装置の研究開発に従事する.1984年に第17回科学計測振興会賞を,1998年にK.J.Button賞を,2000年に電気学会部門大会企画賞を受賞する.趣味はヨット・セーリングとフルート演奏.